Carbon nanotube template produces sub-5 nm features
Researchers at Korea University are reporting on a new way to make nano-trenches less than 5 nm deep with a technique called atomic-layer deposition (ALD), and single-walled carbon nanotubes as templates. The structures produced could be used to make high-density resistive components for a wide range of nanoelectronics devices…. http://nanotechweb.org/cws/article/tech/64707 Making SiO2 nano-trenches